Kevin CHAU
Adjunct Professor
Electronic and Computer Engineering
About
Professor Chau has over 25 years of experience in commercializing Micro-Electro-Mechanical Systems (MEMS) products. He received his BS degree with First Class Honors from the University of Hong Kong in 1980, his MS and PhD degrees from the University of Michigan in 1981 and 1987, respectively, all in Electrical Engineering. He invented the “Dissolved Wafer Process” during his doctoral research, which later found commercialization at Ford Microelectronics, Inc. (for accelerometers), Draper Laboratory/Rockwell/Honeywell (for gyroscopes), and ISSYS (for pressure and flow sensors). It was the educational MEMS process of choice for the Integrated Microsystems Laboratory Course at the University of Michigan for around a decade.
Research Interests
Micro-Electro-Mechanical Systems (MEMS)Technology transferCommercializationManufacturing
Last updated: 4/10/2026